APPLICATIONS

Recent hardware and software breakthroughs in electrical measurement technology have enabled SSM to extend the capabilities of its proven capacitance-voltage (CV), spreading resistance profiling (SRP) systems, and new microwave impedence microscope

• CV techniques are an industry standard, but have been limited to off-line applications because of the need to form test pads on monitor wafers. SSM’s new FastGate^® metrology systems use an Elastic Metal Gate (EM-gate probe) that eliminates the test pad requirement and makes in-line electrical measurement possible.
• SSM has extended SRP applications through automation and ultra-shallow junction methodology to include shallow implants and sub 1-micron epitaxial silicon. SRP also can now measure both SiGe and silicon-on-insulator (SOI) processes.
• NeoMetrik^TM microwave impedence microscope makes in-line measurement of the dielectric constant of low-k materials.

In collaboration with our customers, SSM continues to develop new applications in areas such as low-k dielectrics, ultra-thin and high-k gates, USJ implants, thin epitaxial silicon, thin film read heads, flat panel displays, and more.

To request additional information click here or write to us at  info@ssm-inc.com.

© 2004-2008, Solid State Measurements, Inc. All rights reserved
110 Technology Drive, Pittsburgh, PA 15275 -- ph.+1-412-787-0620, fax+1-412-787-0630