SSM offers both SRP and FastGate^® systems for use in implant monitoring. SSM metrology tools measure implants after annealing and consequently monitor the entire implant and annealing process.

SSM metrology tools have application throughout the entire range of implant and annealing processes including ultra-shallow junction implants.

FastGate^® systems measure either single points, line scans, or full wafer maps with a sensitivity that covers the entire dopant range of implants currently in production and in development.

To request additional information click here or write to us at  info@ssm-inc.com.

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