F.A.Q.'s

Q: How does the FastGate^® measurement work?
A: The FastGate metrology system is based on the principle of elastic deformation. Many materials can be deformed to a limited extent (below their elastic limit) and they will spring back. A perfect example would be to press a rubber ball against a desktop. Note how the ball (probe) deforms and makes an intimate disk shaped contact with the flat desk (wafer). When you release it, the ball elastically returns to its original spherical shape. Neither surface is damaged. We precisely control the force and the motions to create a reproducible contact.

Q: How do FastGate measurements correlate with conventional hardprobe CV?
A: For thicker oxides, FastGate measurements agree well with conventional hard probe CV measurements. For thin oxides, the much smaller diameter EM-gate is much less sensitive to the equivalent circuit effects that plague conventional CV and so produces better results..

Q: How do FastGate and mercury gate (Hg) CV products complement each other?
A: Hg gate CV measures on monitor wafers. Moreover, it is the industry standard for low-k. It's being used by all major low-k developers. FastGate CV measures on product wafers. It is an ideal tool for high-k and thin oxide ( or "advanced gate") work.