• FastGate^® Systems provide high speed, in-line measurements of electrical oxide thickness, leakage current, implant dose and other parameters.
• Hg Probe Mapping Systems provide state-of-the-art process control measurements for low-k materials, epitaxial silicon, thin film read heads, and flat panel displays.
• NanoSRP Automatic Spreading Resistance Systems measure and control thin epitaxial silicon, deep diffusions, SiGe epitaxy, silicon-on-insulator (SOI) and ultra-shallow junction (USJ) implants.
• NeoMetrik^TM Microwave Systems measure the dielectric
  

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SSM 5200/5400

SSM 2000