SSM 5400 System
The SSM FastGate® Metrology System is an integrated and automated metrology tool for characterizing epitaxial silicon layers.  It includes patented elastic metal probe technology and proprietary C-V instrumentation for characterizing these materials.  Probe movement, wafer motion, cassette loading/uploading, and wafer pretreatment are controlled by an internal computer according to user-defined stored recipes.  Data analysis is preformed in a comprehensive C-V analysis package.  All are controlled by a simple-to-use graphical user interface complying with the SEMI E95 standard.

The basic system includes the Front End Module (including wafer stage, robot, and prealigner), System Controller, Power Control Unit, Pneumatics Control Unit, FastGate® probe system with online backup, Capacitance-Voltage Meter, and a comprehensive software suite, including system control software, recipe and measurements databases, and a library of C-V measurement types.

SSM 5400 Features

• Easy to learn and use SEMI E95 User Interface running under Windows® XP-Professional
• Easy transfer of data over fab networks with common networking software.  Compatible with SSM Report Generator client for remote access
• Easy storage, management, and use of over 200 measurement recipes for process-specific needs
• No mercury contact.  Non-damaging and non-contaminating probe permits wafer reuse
• Loading from a single open cassette
• Measurements to 1 mm from wafer edge
• Integrated, programmable pretreatment to stabilize wafer surfaces
• Compliance with all applicable SEMI, NRTL, and EU safety guidelines
                                                                                                                      


To request information or technical papers, click here or write to us at info@ssm-inc.com.
 
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