The SSM 6100 Advanced Implant Metrology System makes rapid, in-line measurement of electrical parameters associated with most near-surface implants including source/drain.  The system has excellent sensitivity over a wide range of implant dose.  In addition to single spot measurements the SSM 6100 can make high resolution maps and line profile.

The system contains a class 1 mini-environment and meets applicable SEMI and CE standards.

SSM FastGate^® Systems use a small elastic probe to form a temporary gate on the dielectric surface. An integrated pattern recognition system locates scribe line test areas. The elastic probe has a diameter of less than 30 nm and does not damage the dielectric surface.

SSM 6100 features
• Wafer diameter up to 300 mm
• Measures in test areas or scribe lines etched in product wafers
• Dual load ports with SMIF, FOUP, and open cassette configurations
• Ballroom and bulkhead mount versions
• Industry standard SECS/GEM communications available

Measurement Parameters

• Average Surface Doping (NSURF)
• Flatband Voltage (V_fb)
• Threshold Voltage (V_T)
  

To request information or technical papers, click here or write to us at info@ssm-inc.com.