The SSM 6300 NeoMetrik™  In-line Electrical Metrology System uses non-contact microwave technology to measure the dielectric constant of low-K materials on production wafers.  The SSM 6300 includes a class 1 mini-environment, microwave metrology head, pattern recognition, full automation, and more.

SSM 6300 features
• Wafer diameter up to 300 mm
• Measures in test areas or scribe lines etched in product wafers
• Dual load ports with SMIF, FOUP, and open cassette configurations
• Ballroom and bulkhead mount versions
• Industry standard SECS/GEM communications available

To request information or technical papers click here or write to us at info@ssm-inc.com.