The SSM 6300 NeoMetrik™ Metrology System is an integrated and automated in-line metrology tool built on SSM's proven 6000-series mainframe.  The 6300 may be used for characterizing blanket films or in-process product films of conventional and low-k dielectric layers at all stages of processing.  It includes patented microwave probe technology and proprietary instrumentation for making measurements in a <30 um area without wafer contact.  Probe movement, wafer motion, and cassette loading/unloading are controlled by an internal computer according to user-defined stored recipes.  An integral baking station to dry hydroscopic films is available and programmable.  Data analysis is performed in a comprehensive software package.  All are controlled by a simple-to-use graphical user interface complying with the SEMI E95 standard.  Host control and data transmission, along with fully-automated wafer loading are available.

The basic system includes the 6000 mainframe, System Controller, NeoMetrik^TM probe head, metrology hardware, and a comprehensive software suite; including system control software, recipe and measurements databases, and date analysis functions.

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